• DocumentCode
    2608769
  • Title

    Characteristics of a Surface Conductivity Moisture Monitor for Hermetic Integrated Circuit Packages

  • Author

    Lowry, R.K. ; Miller, L.A. ; Jonas, A.W. ; Bird, J.M.

  • Author_Institution
    Harris Semiconductor, Box 883, Melbourne, FL 32901
  • fYear
    1979
  • fDate
    28946
  • Firstpage
    97
  • Lastpage
    102
  • Abstract
    An in-situ surface conductivity sensor for measuring water content of hermetic package ambients is described. Results of correlation experiments with mass spectroscopy and volume-effect sensors are presented. Sensor studies of water desorption and contamination by leached ions are discussed. The surface conductivity sensor is well-suited to defining moisture levels within all types of hermetic packages.
  • Keywords
    Conductivity measurement; Integrated circuit measurements; Integrated circuit packaging; Mass spectroscopy; Moisture; Monitoring; Pollution measurement; Sensor phenomena and characterization; Surface contamination; Water pollution;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Reliability Physics Symposium, 1979. 17th Annual
  • Conference_Location
    San Diego, CA, USA
  • ISSN
    0735-0791
  • Type

    conf

  • DOI
    10.1109/IRPS.1979.362877
  • Filename
    4208270
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2608769