Analysis of Headspace Vapor in Sealed Electronic Packages using Plasma Chromotography Mass Spectroscopy

Plasma chromatography/mass spectroscopy is a relatively new ultra sensitive analytical technique which permits the characterization of trace contaminants on the order of parts per billion and less. The technique is capable of detecting both positive and negative ions which are formed at atmospheric pressure as a result of ion-molecule reactions. The capabilities of the PC/MS technique and its application to the analysis of several organic, chlorine and bromine compounds in the headspace of sealed electronic packages is discussed.