• DocumentCode
    2609413
  • Title

    Voltage Contrast SEM Observations with Microprocessor Controlled Device Timing

  • Author

    Bindell, J.B. ; McGinn, J.N.

  • Author_Institution
    Bell Telephone Laboratories, Incorporated, 555 Union Boulevard, Allentown, Pennsylvania 18103
  • fYear
    1980
  • fDate
    29312
  • Firstpage
    55
  • Lastpage
    58
  • Abstract
    A voltage contrast technique which generates a video display of data movement within an active integrated circuit has been developed. The technique utilizes a microprocessor to exercise and control the flow of data within an integrated circuit so that SEM images of sequential logic states can be generated without the use of electron beam blanking.
  • Keywords
    Blanking; Circuits; Clocks; Liquid crystal displays; Logic devices; Microprocessors; Scanning electron microscopy; Shift registers; Timing; Voltage control;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Reliability Physics Symposium, 1980. 18th Annual
  • Conference_Location
    Las Vegas, NV, USA
  • ISSN
    0735-0791
  • Type

    conf

  • DOI
    10.1109/IRPS.1980.362912
  • Filename
    4208308
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2609413