Development and Evaluation of Linear Characteristic of a Complex Flexure Hinge

Author

Ji-Jun Su ; Zhao-Cheng Zhang ; Hong Hu

Author_Institution

Div. of Mech. Eng., Harbin Inst. of Technol., Shenzhen, China

Volume

4

fYear

2009

fDate

21-22 May 2009

Firstpage

319

Lastpage

322

Abstract

This paper concentrates on the development and evaluation of linear characteristics of a complex flexure hinge with high accuracy and large stiffness. The flexure hinge mechanism is used to clamp the shaft of a micropositioning stage based on the inchworm principle. Six key parameters of the flexure hinge are optimized by using finite element method. Developed flexure hinge has very good effects on the clamping and resilience that are accurate and reasonable. The evaluation result shows that the flexure hinge has excellent linear characteristic.

Keywords

clamps; elastic constants; fasteners; finite element analysis; manipulator kinematics; microactuators; piezoelectric actuators; position control; clamping; clamps; complex flexure hinge; finite element method; flexure hinge mechanism; inchworm principle; micropositioning stage; shaft; stiffness; ultra-precision manipulation; Assembly; Clamps; Fasteners; Finite element methods; Mechanical engineering; Optimization methods; Paper technology; Piezoelectric actuators; Resilience; Shafts; finite element method; flexure hinge; linear characteristic; micropositioning stage;

fLanguage

English

Publisher

ieee

Conference_Titel

Information and Computing Science, 2009. ICIC '09. Second International Conference on

Conference_Location

Manchester

Print_ISBN

978-0-7695-3634-7

Type

conf

DOI

10.1109/ICIC.2009.391

Filename

5169191