DocumentCode :
2609840
Title :
Analysis of Organic Surface Contaminants by Plasma Chromatography - Mass Spectroscopy and Raman Microprobe Techniques
Author :
Carr, T.W.
Author_Institution :
IBM Data Systems Division, East Fishkill, Hopewell Junction, N.Y. 12533
fYear :
1980
fDate :
29312
Firstpage :
186
Lastpage :
189
Abstract :
A major problem in the analysis of surface contaminants is the identification and characterization of organics, especially of small areas. The frequently-used surface analytical techniques provide elemental information which is insufficient for organic analysis. Plasma chromotography-mass spectroscopy and the laser Raman microprobe technique are useful in characterizing organic surface contaminants. Both techniques are described and examples of application of the techniques are given.
Keywords :
Chemical analysis; Electrons; Information analysis; Mass spectroscopy; Optical scattering; Optical surface waves; Plasmas; Raman scattering; Surface contamination; Surface emitting lasers;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Reliability Physics Symposium, 1980. 18th Annual
Conference_Location :
Las Vegas, NV, USA
ISSN :
0735-0791
Type :
conf
DOI :
10.1109/IRPS.1980.362937
Filename :
4208333
Link To Document :
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