Title :
Analysis of Organic Surface Contaminants by Plasma Chromatography - Mass Spectroscopy and Raman Microprobe Techniques
Author_Institution :
IBM Data Systems Division, East Fishkill, Hopewell Junction, N.Y. 12533
Abstract :
A major problem in the analysis of surface contaminants is the identification and characterization of organics, especially of small areas. The frequently-used surface analytical techniques provide elemental information which is insufficient for organic analysis. Plasma chromotography-mass spectroscopy and the laser Raman microprobe technique are useful in characterizing organic surface contaminants. Both techniques are described and examples of application of the techniques are given.
Keywords :
Chemical analysis; Electrons; Information analysis; Mass spectroscopy; Optical scattering; Optical surface waves; Plasmas; Raman scattering; Surface contamination; Surface emitting lasers;
Conference_Titel :
Reliability Physics Symposium, 1980. 18th Annual
Conference_Location :
Las Vegas, NV, USA
DOI :
10.1109/IRPS.1980.362937