• DocumentCode
    2610125
  • Title

    Silane glow discharge based double antireflection coatings for cr-Si solar cells

  • Author

    Willeke, G. ; Demesmaeker, E. ; Nijs, J. ; Mertens, R.

  • Author_Institution
    IMEC, Leuven, Belgium
  • fYear
    1990
  • fDate
    21-25 May 1990
  • Firstpage
    275
  • Abstract
    Double-layer antireflection coatings composed of hydrogenated amorphous silicon carbide and oxide have been prepared by silane glow discharge. Superior optical properties are observed on cr-Si as compared to single-layer plasma nitride coatings. When applied to cr-Si solar cell structure a relative increase in both short circuit current and efficiency of 2.8% was observed
  • Keywords
    antireflection coatings; elemental semiconductors; glow discharges; short-circuit currents; silicon; solar cells; SiH4 glow discharge; crystalline Si solar cells; double-layer antireflection coatings; efficiency; short circuit current; Coatings; Crystallization; Glow discharges; Optical films; Optical reflection; Optical refraction; Optical variables control; Photovoltaic cells; Plasma properties; Silicon;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Photovoltaic Specialists Conference, 1990., Conference Record of the Twenty First IEEE
  • Conference_Location
    Kissimmee, FL
  • Type

    conf

  • DOI
    10.1109/PVSC.1990.111630
  • Filename
    111630
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2610125