Title :
Silane glow discharge based double antireflection coatings for cr-Si solar cells
Author :
Willeke, G. ; Demesmaeker, E. ; Nijs, J. ; Mertens, R.
Author_Institution :
IMEC, Leuven, Belgium
Abstract :
Double-layer antireflection coatings composed of hydrogenated amorphous silicon carbide and oxide have been prepared by silane glow discharge. Superior optical properties are observed on cr-Si as compared to single-layer plasma nitride coatings. When applied to cr-Si solar cell structure a relative increase in both short circuit current and efficiency of 2.8% was observed
Keywords :
antireflection coatings; elemental semiconductors; glow discharges; short-circuit currents; silicon; solar cells; SiH4 glow discharge; crystalline Si solar cells; double-layer antireflection coatings; efficiency; short circuit current; Coatings; Crystallization; Glow discharges; Optical films; Optical reflection; Optical refraction; Optical variables control; Photovoltaic cells; Plasma properties; Silicon;
Conference_Titel :
Photovoltaic Specialists Conference, 1990., Conference Record of the Twenty First IEEE
Conference_Location :
Kissimmee, FL
DOI :
10.1109/PVSC.1990.111630
