Title :
Process And Characterization Of Nitrogenated Carbon
Author :
Ming M.Yang ; Chao, J.L. ; Russak, M.A.
Author_Institution :
HMT Technology
Keywords :
Argon; Electric resistance; Magnetic materials; Nitrogen; Protection; Silicon; Sputtering; Stress; Substrates; Temperature;
Conference_Titel :
Magnetics Conference, 1997. Digests of INTERMAG '97., 1997 IEEE International
Conference_Location :
New Orleans, LA, USA
Print_ISBN :
0-7803-3862-6
DOI :
10.1109/INTMAG.1997.597415
