• DocumentCode
    2610921
  • Title

    Phase Dependent Voltage Contrast - An Inexpensive SEM Addition for LSI Failure Analysis

  • Author

    Younkin, Douglas

  • Author_Institution
    McDonnell Douglas Astronautics Company, St. Louis Division, Post Office Box 516, St. Louis, Missouri 63166
  • fYear
    1981
  • fDate
    29677
  • Firstpage
    264
  • Lastpage
    268
  • Abstract
    A simple and inexpensive SEM voltage contrast technique has been developed which displays die-level logic-state information by distinguishing between in- and out-of-phase signals with respect to a reference signal. The technique as currently implemented also permits on-chip delay measurements down to 75 ns with ±10% resolution. Electron beam blanking is not required.
  • Keywords
    Blanking; Clocks; Delay; Electron beams; Failure analysis; Large scale integration; Logic devices; Scanning electron microscopy; Structural beams; Voltage;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Reliability Physics Symposium, 1981. 19th Annual
  • Conference_Location
    Las Vegas, NV, USA
  • ISSN
    0735-0791
  • Type

    conf

  • DOI
    10.1109/IRPS.1981.363007
  • Filename
    4208406
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2610921