Title :
Reliability Implications of Polyimide Multilevel Insulators
Author :
Brown, George A.
Author_Institution :
Texas Instruments Incorporated, P.O. Box 225012, M/S 82, Dallas, Texas 75265
Keywords :
Aluminum; Circuits; Conductivity; Contamination; Insulation; Optical films; Pollution measurement; Polyimides; Silicon; Temperature distribution;
Conference_Titel :
Reliability Physics Symposium, 1981. 19th Annual
Conference_Location :
Las Vegas, NV, USA
DOI :
10.1109/IRPS.1981.363010
