DocumentCode

2610963

Title

Reliability Implications of Polyimide Multilevel Insulators

Author

Brown, George A.

Author_Institution

Texas Instruments Incorporated, P.O. Box 225012, M/S 82, Dallas, Texas 75265

fYear

1981

fDate

29677

Firstpage

282

Lastpage

286

Keywords

Aluminum; Circuits; Conductivity; Contamination; Insulation; Optical films; Pollution measurement; Polyimides; Silicon; Temperature distribution;

fLanguage

English

Publisher

ieee

Conference_Titel

Reliability Physics Symposium, 1981. 19th Annual

Conference_Location

Las Vegas, NV, USA

ISSN

0735-0791

Type

conf

DOI

10.1109/IRPS.1981.363010

Filename

4208409