Title :
Reliability lifetest on etch-stop 0.5-μm PHEMT with reduced gate pitch and ohmic width geometry
Author :
Saigusa, Haru ; Malik, Anju ; Rushing, Lance ; Gao, Frank
Keywords :
Etching; FETs; Geometry; PHEMTs; Semiconductor device reliability; Stress; Switches; Temperature; Testing; Throughput;
Conference_Titel :
GaAs Reliability Workshop, 2003. Proceedings
Print_ISBN :
0-7908-0104-3
DOI :
10.1109/GAASRW.2003.183765
