Title :
Aluminum Conductor Line Corrosion
Author :
Bhide, Vishwas ; Eldridge, J.M.
Author_Institution :
American Microsystems, Inc., 3800 Homestead Road, Santa Clara, CA 95051
Abstract :
Effects of P2O5 concentration on the surface conductivity of Phospho Silicate Glass (PSG) films and the attendant corrosion of Al conductor lines on the PSG was investigated using various Temperature-Humidity-Bias conditions. These results will be presented, along with those obtained using various techniques to increase the passivity of the metal, PSG surface modification and conformal die coating.
Keywords :
Aluminum; Coatings; Conductivity; Conductors; Corrosion; Fingers; Metallization; Passivation; Plastics; Substrates;
Conference_Titel :
Reliability Physics Symposium, 1983. 21st Annual
Conference_Location :
Phoenix, AZ, USA
DOI :
10.1109/IRPS.1983.361960
