DocumentCode
2612369
Title
Improving channel mobility in graphene-FETs by minimizing surface phonon scattering - A simulation study
Author
Yu, Xinxin ; Kang, Jiahao ; Zhang, Jinyu ; Tian, Lilin ; Yu, Zhiping
Author_Institution
Inst. of Microelectron., Tsinghua Univ., Beijing, China
fYear
2010
fDate
6-8 Sept. 2010
Firstpage
13
Lastpage
16
Abstract
In graphene-based field-effect transistors (graphene FETs), the carrier channel mobility is strongly influenced by substrate and gate dielectric materials. In this paper, we theoretically investigated the carrier channel mobility for the graphene-FET. Surface phonon (SP) scattering, screened Coulomb scattering, acoustic phonon and optical phonon scattering mechanisms are considered in the mobility calculation. Applying Mahan´s theory, the SP scattering in a gate stack structure is evaluated. It is found that SP scattering plays an important role especially in high-k dielectrics. The charged impurity and SP scattering can be suppressed effectively by inserting a polymer layer between the gate dielectric and graphene. The thickness of the polymer layer, however, should be carefully selected to balance the channel carrier mobility enhancement and gate control ability. Our calculation results are consistent with previous calculations and experimental observations.
Keywords
carrier mobility; circuit simulation; graphene; high-k dielectric thin films; insulated gate field effect transistors; phonons; C; Mahan theory; acoustic phonon scattering mechanism; carrier channel mobility; channel carrier mobility enhancement; charged impurity; gate control ability; gate dielectric; gate stack structure; graphene-FET; high-k dielectrics; mobility calculation; optical phonon scattering mechanism; polymer layer; screened Coulomb scattering; surface phonon scattering; Dielectrics; High K dielectric materials; Logic gates; Metals; Phonons; Polymers; Scattering; graphene-FET; mobility; polymer; surface phonon scattering;
fLanguage
English
Publisher
ieee
Conference_Titel
Simulation of Semiconductor Processes and Devices (SISPAD), 2010 International Conference on
Conference_Location
Bologna
ISSN
1946-1569
Print_ISBN
978-1-4244-7701-2
Electronic_ISBN
1946-1569
Type
conf
DOI
10.1109/SISPAD.2010.5604586
Filename
5604586
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