DocumentCode
2612806
Title
Precision VLSI Cross-Sectioning and Staining
Author
MIlls, T.
Author_Institution
Hewlett-Packard Company, System Technology, 3400 Harmony Road, Ft. Collins Colorado. 303-226-3800
fYear
1983
fDate
30407
Firstpage
324
Lastpage
331
Abstract
Last year precision VLSI cross-sectioning and staining was introduced to IEEE IRPS. Included in this year´s paper is how to implement a 4X productivity improvement of this cross-sectioning technique. Staining techniques are broken down so a failure analyst and/or process engineer can easily formulate and fine tune a stain, also a list of most commonly used stain formulations.
Keywords
Failure analysis; Filters; Fixtures; Glass; Lapping; Lubricating oils; Milling machines; Productivity; Protection; Very large scale integration;
fLanguage
English
Publisher
ieee
Conference_Titel
Reliability Physics Symposium, 1983. 21st Annual
Conference_Location
Phoenix, AZ, USA
ISSN
0735-0791
Type
conf
DOI
10.1109/IRPS.1983.362006
Filename
4208527
Link To Document