• DocumentCode
    2613154
  • Title

    Pulsed Infra-Red Microscopy for Debugging Latch-Up on CMOS Products

  • Author

    Khurana, Neeraj

  • Author_Institution
    Intel Corp. Santa Clara, CA
  • fYear
    1984
  • fDate
    30773
  • Firstpage
    122
  • Lastpage
    127
  • Abstract
    A Near Infra Red Microscope has been used to debug latch-up problems on CMOS products. The microscope is used to image the recombination radiaton emitted by the forward biased junctions in SCR latch-up. If latchup occurrs at one location it will spread like a cancer untill several sites have latched up. This causes the traditional heat sensing techniques to give incorrect results. Techniques were developed to view and understand the mechanisms which cause latch-up spreading. Various kinds of I/O latch-up modes have been studied and described.
  • Keywords
    CMOS technology; Debugging; Instruments; Liquid crystals; Microscopy; Silicon devices; Spontaneous emission; Thyristors; Variable structure systems; Very large scale integration;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Reliability Physics Symposium, 1984. 22nd Annual
  • Conference_Location
    Las Vegas, NV, USA
  • ISSN
    0735-0791
  • Type

    conf

  • DOI
    10.1109/IRPS.1984.362029
  • Filename
    4208553