DocumentCode
2613612
Title
Electromigration Evaluation - MTF Modeling and Accelerated Testing
Author
Burkett, T.A. ; Miller, R.L.
Author_Institution
Harris Semiconductor, P. O. Box 883, Melbourne. FL 32901-0101
fYear
1984
fDate
30773
Firstpage
264
Lastpage
272
Abstract
Fail times and activation energies were determined to vary widely for different metal compositions. General results indicate that temperature, current density and grain size are the most dominant factors that affect electromigration behavior for the various metal compositions. The technique of using changes in metal stripe resistance to predict the time of failure was evaluated.
Keywords
Circuit testing; Conductors; Current density; Electromigration; Life estimation; Ovens; Passivation; Sputtering; Temperature; Vehicles;
fLanguage
English
Publisher
ieee
Conference_Titel
Reliability Physics Symposium, 1984. 22nd Annual
Conference_Location
Las Vegas, NV, USA
ISSN
0735-0791
Type
conf
DOI
10.1109/IRPS.1984.362057
Filename
4208581
Link To Document