DocumentCode
2614240
Title
A Paradoxical Relationship between Width/Spacing of Aluminum Electrodes and Aluminum Corrosion
Author
Wada, T. ; Higuchi, H. ; Ajiki, T.
Author_Institution
Matsushita Electronics Corporation, QA Center Semiconductor Group 1, Kotari, Yakemachi, Nagaokakyo, Kyoto, 617 Japan Tel. 075-951-8151
fYear
1985
fDate
31107
Firstpage
159
Lastpage
163
Abstract
Life tests on aluminum interconnect showed that pattern with a large width and spacing can corrode faster than those with a smaller width and spacing. This paradoxical phenomenon was found on temperature, humidity and bias test at 85 to 140°C, 85%RH, and 0 to 150V, and can be explained by crack formation in the passivation layer induced by aluminum corrosion.
Keywords
Aluminum; Corrosion; Electrodes; Electronics packaging; Humidity; Life estimation; Plasma temperature; Plastics; Testing; Water heating;
fLanguage
English
Publisher
ieee
Conference_Titel
Reliability Physics Symposium, 1985. 23rd Annual
Conference_Location
Orlando, FL, USA
ISSN
0735-0791
Type
conf
DOI
10.1109/IRPS.1985.362092
Filename
4208619
Link To Document