• DocumentCode
    2614240
  • Title

    A Paradoxical Relationship between Width/Spacing of Aluminum Electrodes and Aluminum Corrosion

  • Author

    Wada, T. ; Higuchi, H. ; Ajiki, T.

  • Author_Institution
    Matsushita Electronics Corporation, QA Center Semiconductor Group 1, Kotari, Yakemachi, Nagaokakyo, Kyoto, 617 Japan Tel. 075-951-8151
  • fYear
    1985
  • fDate
    31107
  • Firstpage
    159
  • Lastpage
    163
  • Abstract
    Life tests on aluminum interconnect showed that pattern with a large width and spacing can corrode faster than those with a smaller width and spacing. This paradoxical phenomenon was found on temperature, humidity and bias test at 85 to 140°C, 85%RH, and 0 to 150V, and can be explained by crack formation in the passivation layer induced by aluminum corrosion.
  • Keywords
    Aluminum; Corrosion; Electrodes; Electronics packaging; Humidity; Life estimation; Plasma temperature; Plastics; Testing; Water heating;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Reliability Physics Symposium, 1985. 23rd Annual
  • Conference_Location
    Orlando, FL, USA
  • ISSN
    0735-0791
  • Type

    conf

  • DOI
    10.1109/IRPS.1985.362092
  • Filename
    4208619