Title :
A Practical VLSI Characterization and Failure Analysis System for the IC User
Author :
King, Randy ; Hiatt, John
Author_Institution :
Hewlett-Packard Company, 1212 Valley House Drive, Rohnert Park, California 94923
Abstract :
Instrumentation for characterization and failure analysis of VLSI devices is described. The system combines functional and parametric test capability with voltage contrast imaging techniques. Digital signal processing allows comparison of good and bad devices to isolate faults. Reasonable cost and complexity makes the system appropriate for the IC user rather than limiting it to development applications. Specific application histories are presented.
Keywords :
Application specific integrated circuits; Costs; Digital signal processing; Failure analysis; History; Instruments; Limiting; System testing; Very large scale integration; Voltage;
Conference_Titel :
Reliability Physics Symposium, 1986. 24th Annual
Conference_Location :
Anaheim, CA, USA
DOI :
10.1109/IRPS.1986.362115
