Title :
A Circular Output Protection Device using Bipolar Action
Author :
Momodomi, Masaki ; Horiguchi, Fumio ; Ogura, Mitsugi ; Kozuka, Eiji
Author_Institution :
VLSI Research Center, Toshiba Corporation, 1, Komukai Toshiba-cho, Saiwai-ku, Kawasaki, 210 Japan. (044)-511-2111
Abstract :
This paper will cover ESD (Electrostatic Discharge) protection reliability in an 1.2 micron NMOS technology. Several OPDs (Output Protection Devices) were designed and measured in order to study the location of energy dissipation and the ability of energy absorption during ESD event. A new circular OPD using bipolar action is proposed as the most promising OPD. The high reliability of this OPD is also described.
Keywords :
Aluminum; Circuit testing; Electrostatic discharge; Electrostatic measurements; Integrated circuit measurements; MOS devices; Protection; Threshold voltage; Variable structure systems; Very large scale integration;
Conference_Titel :
Reliability Physics Symposium, 1987. 25th Annual
Conference_Location :
San Diego, CA, USA
DOI :
10.1109/IRPS.1987.362174
