Title :
Semi-analytical Magnetic-Structural coupling with contact analysis for MEMS/NEMS
Author :
Quang, P. Pham ; Delinchant, B. ; Coulomb, J.l. ; du Peloux, B.
Author_Institution :
Grenoble Electr. Eng. Lab. (G2ELab), St. Martin d´´Heres, France
Abstract :
This paper presents a methodology and a tool for the coupled magnetic-structural with semi-analytical models. For this coupling, the magnetic model is available, we developed the structural-contact model for the cantilever beam and valid it by finite element simulation. This coupling is dedicated to the optimization process of MEMS/NEMS in general and to nano switch in particular.
Keywords :
cantilevers; finite element analysis; micromechanical devices; nanoelectromechanical devices; optimisation; MEMS; NEMS; cantilever beam; contact analysis; finite element simulation; nanoswitch; optimization; semi-analytical magnetic-structural coupling; structural-contact model; Contacts; Couplings; Deformable models; Geometry; Magnetic analysis; Magnetic separation; Micromechanical devices; Nanoelectromechanical systems; Structural beams; Switches;
Conference_Titel :
Electromagnetic Field Computation (CEFC), 2010 14th Biennial IEEE Conference on
Conference_Location :
Chicago, IL
Print_ISBN :
978-1-4244-7059-4
DOI :
10.1109/CEFC.2010.5481848
