Title :
GaAs integrated circuit fabrication at Motorola
Author :
O´Neil, P. ; Bernhardt, B. ; Nikpourian, F. ; Della, C. ; Abad, Y. ; Hansell, G.
Author_Institution :
Motorola Semiconductor Products Sector, Tempe, AZ, USA
Abstract :
Compound Semiconductor (CS-1) is Motorola´s first production-oriented gallium-arsenide integrated-circuit fabrication facility. Initiated in the Fall of 1990, CS-1 is a state-of-the-art manufacturing facility designed to support the growing internal Motorola needs for GaAs ICs for consumer products. The authors overview current CS-1 process flows, low-cost processing methodologies, online production monitoring, and fast cycle time capabilities.<>
Keywords :
CMOS digital integrated circuits; III-V semiconductors; costing; economics; field effect MMIC; field effect digital integrated circuits; gallium arsenide; integrated circuit manufacture; integrated circuit yield; power integrated circuits; CMOS; CS-1 facility; GaAs; III-V semiconductor; MAFET technology; MMIC processing; Motorola facility; consumer products; digital process; fast cycle time capabilities; integrated circuit fabrication; low-cost processing methodologies; online production monitoring; power process; process flows; Costs; FETs; Fabrication; Gallium arsenide; Integrated circuit interconnections; Integrated circuit technology; MMICs; Manufacturing processes; Ohmic contacts; Resistors;
Conference_Titel :
Gallium Arsenide Integrated Circuit (GaAs IC) Symposium, 1993. Technical Digest 1993., 15th Annual
Conference_Location :
San Jose, CA, USA
Print_ISBN :
0-7803-1393-3
DOI :
10.1109/GAAS.1993.394487
