MEMS-tunable novel monolithic optical filters in InP with horizontal Bragg mirrors

Author

Datta, Madhumita ; Pruessner, Marcel W. ; Kelly, Daniel P. ; Ghodssi, Reza

fYear

2003

fDate

10-12 Dec. 2003

Firstpage

282

Lastpage

283

Abstract

Theoretical analysis of an optical waveguide based horizontal resonant microcavity filter in InP, which is tunable within a broad wavelength range of 350 nm by MEMS electrostatic actuation is presented in this paper. The microcavity is formed between the input and output waveguides by fabricating monolithically integrated horizontal distributed Bragg reflector (DBR) mirrors. The length of the microcavity is varied by a total of 200 nm in steps of 10 nm to meet the Fabry-Perot resonant condition. Spectral response of the proposed resonant filter is numerically simulated using typical values for monolithic input beam size (3 μm×1.5 μm) and first-order mirror reflectivities.

Keywords

III-V semiconductors; distributed Bragg reflectors; indium compounds; integrated optics; micro-optics; microcavities; micromechanical devices; monolithic integrated circuits; optical tuning; optical waveguide filters; reflectivity; 10 nm; 200 nm; 350 nm; Fabry-Perot resonant condition; InP; MEMS electrostatic actuation; distributed Bragg reflector; first order mirror reflectivities; horizontal Bragg mirrors; horizontal resonant microcavity filter; monolithic optical filters; optical waveguide; spectral response; Distributed Bragg reflectors; Electrostatic analysis; Indium phosphide; Microcavities; Micromechanical devices; Mirrors; Optical filters; Optical waveguide theory; Optical waveguides; Resonance;

fLanguage

English

Publisher

ieee

Conference_Titel

Semiconductor Device Research Symposium, 2003 International

Print_ISBN

0-7803-8139-4

Type

conf

DOI

10.1109/ISDRS.2003.1272097

Filename

1272097