DocumentCode
2617510
Title
Effects of bulk and MOCVD thin film dielectric cover on the characteristics of microstrip interconnect structures
Author
Joshi, K.K. ; Pollard, R.D. ; Postoyalko, V.
Author_Institution
Dept. of Electron. & Electr. Eng., Leeds Univ., UK
fYear
1993
fDate
20-22 Oct 1993
Firstpage
22
Lastpage
24
Abstract
A microstrip with dielectric cover is fabricated with metal-organic chemical vapor deposition (MOCVD) Al2O3 thin film. Frequency shift and 137% to 259% increase in the Q factor of microstrip resonators in the presence of dielectric thin film are measured between 2-26GHz
Keywords
Q-factor; alumina; chemical vapour deposition; dielectric thin films; frequency stability; microstrip resonators; packaging; 2 to 26 GHz; Al2O3 thin film; MOCVD thin film dielectric cover; Q factor; dielectric thin film; frequency shift; metal-organic chemical vapor deposition; microstrip interconnect structures; microstrip resonators; Dielectric materials; Dielectric measurements; Dielectric substrates; Dielectric thin films; Frequency measurement; MOCVD; Microstrip resonators; Q factor; Q measurement; Transistors;
fLanguage
English
Publisher
ieee
Conference_Titel
Electrical Performance of Electronic Packaging, 1993
Conference_Location
Monterey, CA
Print_ISBN
0-7803-1427-1
Type
conf
DOI
10.1109/EPEP.1993.394600
Filename
394600
Link To Document