• DocumentCode
    2618137
  • Title

    Simulation results and formalism for global-local scheduling in semiconductor manufacturing facilities

  • Author

    Bureau, Mickaël ; Dauzère-Pérès, Stéphane ; Yugma, Claude ; Vermariën, Leon ; Maria, Jean-Bernard

  • Author_Institution
    Ecole des Mines de St.-Etienne, Gardanne
  • fYear
    2007
  • fDate
    9-12 Dec. 2007
  • Firstpage
    1768
  • Lastpage
    1773
  • Abstract
    This article deals with an approach for managing scheduling in semiconductor manufacturing facilities. The proposed approach ensures consistency between global and local scheduling decisions, by ensuring that global objectives are met through dynamic adaptation of the local behavior. This approach is validated by simulation. After describing the context and the framework of the approach, we introduce the formalism and present first simulation results obtained on real data of the fab of STMicroelectronics, Rousset. The experimental tests are promising since substantial improvements are obtained on criteria such as cycle time, number of completed lots, etc.
  • Keywords
    scheduling; semiconductor device manufacture; simulation; STMicroelectronics; global-local scheduling; semiconductor manufacturing facility; simulation; Analytical models; Context modeling; Dynamic scheduling; Job shop scheduling; Manufacturing processes; Manufacturing systems; Production facilities; Semiconductor device manufacture; Semiconductor device modeling; Semiconductor device testing;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Simulation Conference, 2007 Winter
  • Conference_Location
    Washington, DC
  • Print_ISBN
    978-1-4244-1306-5
  • Electronic_ISBN
    978-1-4244-1306-5
  • Type

    conf

  • DOI
    10.1109/WSC.2007.4419801
  • Filename
    4419801