DocumentCode
2618137
Title
Simulation results and formalism for global-local scheduling in semiconductor manufacturing facilities
Author
Bureau, Mickaël ; Dauzère-Pérès, Stéphane ; Yugma, Claude ; Vermariën, Leon ; Maria, Jean-Bernard
Author_Institution
Ecole des Mines de St.-Etienne, Gardanne
fYear
2007
fDate
9-12 Dec. 2007
Firstpage
1768
Lastpage
1773
Abstract
This article deals with an approach for managing scheduling in semiconductor manufacturing facilities. The proposed approach ensures consistency between global and local scheduling decisions, by ensuring that global objectives are met through dynamic adaptation of the local behavior. This approach is validated by simulation. After describing the context and the framework of the approach, we introduce the formalism and present first simulation results obtained on real data of the fab of STMicroelectronics, Rousset. The experimental tests are promising since substantial improvements are obtained on criteria such as cycle time, number of completed lots, etc.
Keywords
scheduling; semiconductor device manufacture; simulation; STMicroelectronics; global-local scheduling; semiconductor manufacturing facility; simulation; Analytical models; Context modeling; Dynamic scheduling; Job shop scheduling; Manufacturing processes; Manufacturing systems; Production facilities; Semiconductor device manufacture; Semiconductor device modeling; Semiconductor device testing;
fLanguage
English
Publisher
ieee
Conference_Titel
Simulation Conference, 2007 Winter
Conference_Location
Washington, DC
Print_ISBN
978-1-4244-1306-5
Electronic_ISBN
978-1-4244-1306-5
Type
conf
DOI
10.1109/WSC.2007.4419801
Filename
4419801
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