Title :
2000 Semiconductor Manufacturing Technology Workshop (Cat. No.00EX406)
Abstract :
The following topics were dealt with. Technology strategy, production planning, yield enhancement and cycle time improvement, CIM system and process control
Keywords :
computer aided production planning; computer integrated manufacturing; integrated circuit yield; process control; strategic planning; CIM system; cycle time improvement; process control; production planning; technology strategy; yield enhancement;
Conference_Titel :
Semiconductor Manufacturing Technology Workshop, 2000
Conference_Location :
Hsinchu, Taiwan
Print_ISBN :
0-7803-6374-4
DOI :
10.1109/SMTW.2000.883084
