Title :
Translating fab cycle time and output targets into production control requirements for tool groups
Author :
Hu, Ming-Der ; Chang, Shi-Chung
Author_Institution :
Dept. of Electr. Eng., Nat. Taiwan Univ., Taipei, Taiwan
Abstract :
Throughput rate and cycle time are two of the major production targets of a fab. As a fab is often operated under distributed production flow control, the overall delivery specifications can be achieved only when individual tool groups are operated to meet appropriate local performance requirements. In this paper, a control parameter extraction methodology is proposed to establish an explicit relationship between production targets of a fab and local flow control parameters in terms of mean rates and upper bounds on variations of input processes for each tool group. These parameters can further be utilized to derive managerially tangible requirements for cycle times and wafer-in-processes and to create guidelines for distributed production control leading to the desired delivery specifications. Validations over two benchmark fab models demonstrate that our approach is mostly within 95% of accuracy and requires less than one millisecond of CPU time
Keywords :
integrated circuit manufacture; manufacturing resources planning; process control; production control; semiconductor process modelling; CPU time; benchmark fab models; control parameter extraction methodology; cycle time; delivery specifications; distributed production control; distributed production flow control; fab cycle time; fab output targets; input process variations; local flow control parameters; local performance requirements; overall delivery specifications; production control; production targets; throughput rate; tool groups; wafer-in-process requirements; Distributed control; Fabrication; Flow production systems; Industrial engineering; Laboratories; Parameter extraction; Production control; Semiconductor device modeling; Throughput; Upper bound;
Conference_Titel :
Semiconductor Manufacturing Technology Workshop, 2000
Conference_Location :
Hsinchu
Print_ISBN :
0-7803-6374-4
DOI :
10.1109/SMTW.2000.883087