Photoacoustic chemical sensing on a MEMS-based platform

This paper deals with the gas detection system (MEMS-based platform), which uses photoacoustic spectroscopy as a monitoring technique. One advantage of photoacoustic spectroscopy is that the photoacoustic signals scales inversely with the cross-sectional area of the acoustic cavity. This paper also deals with the MEMS acoustic cavity design which investigates multilayer stacking arrangements using several low temperature bonding schemes to allow for complete fabrication of acoustic structures present in macro-cell design. Results are presented describing the miniature photoacoustic cell capabilities, current MEMS microphone performance and initial cell designs based on transmission-line modeling.