Terahertz beam steering using structured MEMS surfaces for networked wireless sensing

In order to fully explore the great potential of terahertz (THz) waves in networked wireless sensing both as sensing probes and carrier waves, beam steering techniques are required. However, conventional beam steering approaches with delay-line based phased arrays would face technical difficulties due to the too high frequency of THz waves. In this paper, we propose to electrically control the THz beam propagation based on surface-wave scattering from structured MEMS surfaces, which would lead to very compact and low-cost THz phased arrays.