Title :
Bulk acoustic wave mode shaping using a transversely graded electrode
Author :
Malocha, Donald C.
Author_Institution :
Dept. of Electr. & Comput. Eng., Univ. of Central Florida, Orlando, FL, USA
Abstract :
This paper presents the basic principles of the transverse graded electrode (TGE) for the tailoring of BAW transverse modes. The theoretical basis and equations are summarized and the stacked matrix theory for solutions of the mode profiles is introduced for the BAW structures. The stacked matrix approach, well known from optics and electromagnetics, is powerful since it allows for easy solution of an arbitrary number of one dimensional waveguide sections. The results assume an isotropic substrate in the transverse propagation directions for solutions of the number of modes, the mode profiles, the mode velocities, and mode coupling. Different theoretical mode profiles are presented for various electrode weighting schemes
Keywords :
acoustic wave propagation; acoustic wave velocity; bulk acoustic wave devices; electrodes; BAW transverse modes; bulk acoustic wave mode shaping; electrode weighting schemes; isotropic substrate; mode coupling; mode profiles; mode velocities; stacked matrix theory; transversely graded electrode; Acoustic waves; Electrodes; Electromagnetic propagation; Electromagnetic scattering; Electromagnetic waveguides; Equations; Optical propagation; Optical waveguide theory; Optical waveguides; Transmission line matrix methods;
Conference_Titel :
Frequency Control Symposium, 1997., Proceedings of the 1997 IEEE International
Conference_Location :
Orlando, FL
Print_ISBN :
0-7803-3728-X
DOI :
10.1109/FREQ.1997.638780
