Modeling and analysis of the squeezed film damping effect on electrostatic microactuators

Author

Vagia, Marialena ; Tzes, Anthony

Author_Institution

Comput. Eng. Dept., Patras Univ., Achaia

fYear

2008

fDate

25-27 June 2008

Firstpage

469

Lastpage

474

Abstract

In this article the modeling aspects of an electrostatic microactuator with squeezed thin film damping effects are presented. The actuator is composed of a microcapacitor whose one plate is clamped on the ground while the other plate is floating on the air with the aid of an external supporting spring. Its highly nonlinear dynamic model is linearized at various operating points. Variations of the gap between the plates and the air pressure of the system are examined in order to find possible changes in the bifurcation points or other characteristics of the system. Significant conclusions for the case of the bifurcation point have been drawn and simulation studies substantiate the presented results.

Keywords

bifurcation; electrostatic devices; microactuators; nonlinear dynamical systems; thin films; air pressure; bifurcation points; electrostatic microactuators; microcapacitors; nonlinear dynamic model; squeezed film damping effect; Automatic control; Bifurcation; Damping; Electrostatic actuators; Electrostatic analysis; Equations; Magnetic films; Microactuators; Nonlinear dynamical systems; Springs;

fLanguage

English

Publisher

ieee

Conference_Titel

Control and Automation, 2008 16th Mediterranean Conference on

Conference_Location

Ajaccio

Print_ISBN

978-1-4244-2504-4

Electronic_ISBN

978-1-4244-2505-1

Type

conf

DOI

10.1109/MED.2008.4602247

Filename

4602247