Modelling and design of microflow sensors based on measuring of temperature

This article describes modelling and measurement of tiny liquid flows of the order of microlitres through millilitres per minute. The measurement of mentioned flow range is becoming more and more important for a lot of applications in the life science, analysis, biotechnologies, synthesis (of e.g. pharmaceuticals) and nanotechnology markets. Accompanying demands to flow sensors suited for this low flow range are an extremely small internal volume, the use of for instance PEEK and fused silica as wetted material for the flow sensor tube (instead of stainless steel), and a modular set-up of the instruments, so they can be easily exchanged and adapted to a new need.