DocumentCode
2621460
Title
Postprocessing technologies, interface circuits and packaging strategies for CMOS compatible gas flow sensors
Author
Bruschia, P. ; Piotto, M. ; Bacci, Nicholas
Author_Institution
Dipt. di Ingegneria dell´´Informazione, Pisa
fYear
2007
fDate
26-27 June 2007
Firstpage
1
Lastpage
6
Abstract
Thermal gas flow meters based on two different architectures have been fabricated using two commercial CMOS processes. Low cost postprocessing methods, adapted to the features of modern industrial processes, are discussed. Three inexpensive packaging strategies are proposed and their effects on the device response have been compared. The sensitivity dependence on gas type has been investigated for the two proposed architectures.
Keywords
CMOS integrated circuits; flow sensors; gas sensors; semiconductor device packaging; CMOS compatible gas flow sensors; interface circuits; low cost postprocessing methods; packaging strategies; thermal gas flow meters; CMOS technology; Circuits; Costs; Dielectrics and electrical insulation; Fluid flow; Gas detectors; Packaging; Probes; Temperature sensors; Thermal sensors;
fLanguage
English
Publisher
ieee
Conference_Titel
Advances in Sensors and Interface, 2007. IWASI 2007. 2nd International Workshop on
Conference_Location
Bari
Print_ISBN
978-1-4244-1245-7
Electronic_ISBN
978-1-4244-1245-7
Type
conf
DOI
10.1109/IWASI.2007.4420018
Filename
4420018
Link To Document