Giant Magnetoimpedance Sensor with Tortuous Shape Fabricated by MEMS Technology

Author

Jianxiong, Ye

Author_Institution

Sch. of Mech. & Electr. Eng., NanChang Inst. of Technol., Nanchang, China

Volume

2

fYear

2011

fDate

6-7 Jan. 2011

Firstpage

293

Lastpage

296

Abstract

Field-annealed Co-based amorphous ribbon (Metglas® 2705M) with a tortuous structure is fabricated by MEMS technology and the giant magneto impedance (GMI) effects are studied at various magnetic field and frequency. The magnetization curve of the ribbon shows small coercivity and anisotropy field. The maximum longitudinal GMI ratio of the ribbon is 193.7% and the magnetic field sensitivity is 17.4%/Oe. The GMI peak value of the tortuous ribbon is much larger than the single strip ribbon due to the larger external inductance result from the tortuous shape. Tortuous structure and line width both have strong influence on GMI effect. This tortuous shape ribbon can be considered as a good candidate to fabricate the GMI-based sensor with excellent performance.

Keywords

amorphous magnetic materials; cobalt alloys; coercive force; giant magnetoresistance; magnetic anisotropy; magnetic annealing; magnetic sensors; magnetoresistive devices; metallic glasses; microsensors; CoJkJk; MEMS; Metglas 2705M; anisotropy field; coercivity; field-annealed amorphous ribbon; giant magnetoimpedance sensor; line width; magnetic field sensitivity; magnetization curve; tortuous structure; Amorphous magnetic materials; Inductance; Magnetic anisotropy; Magnetic fields; Periodic structures; Shape; Strips; Co-based ribbon; Giant magnetoimpedance; MEMS; Sensor; Tortuous shape;

fLanguage

English

Publisher

ieee

Conference_Titel

Measuring Technology and Mechatronics Automation (ICMTMA), 2011 Third International Conference on

Conference_Location

Shangshai

Print_ISBN

978-1-4244-9010-3

Type

conf

DOI

10.1109/ICMTMA.2011.360

Filename

5721178