Title :
High-Q inductors on silicon using a quasi thin film microstrip technique
Author :
Erben, U. ; Abele, P. ; Behammer, D. ; Ergraber, H. ; Schmacher, H.
Author_Institution :
Dept. of Electron. Devices & Circuits, Ulm Univ., Germany
Abstract :
In high frequency circuit design inductors play an important role, being applied in matching networks, in filter structures and as load impedances. Because of this, high quality factors and reasonable high inductance values at lower frequencies are highly desired. The introduction of thick dielectric layers with small permittivities enhances both figures of merit.
Keywords :
MMIC; Q-factor; UHF integrated circuits; inductors; microstrip components; silicon; thin film devices; 500 MHz to 15 GHz; HF circuits; Si; Si substrate; filter structures; high frequency circuit design; high quality factors; high-Q inductors; load impedances; matching networks; permittivities; quasi thin film microstrip technique; thick dielectric layers; Circuit synthesis; Dielectric thin films; Frequency; Impedance; Matched filters; Microstrip; Semiconductor thin films; Silicon; Thin film circuits; Thin film inductors;
Conference_Titel :
Silicon Monolithic Integrated Circuits in RF Systems, 1998. Digest of Papers. 1998 Topical Meeting on
Conference_Location :
Ann Arbor, MI, USA
Print_ISBN :
0-7803-5288-2
DOI :
10.1109/SMIC.1998.750211
