Title :
High impedance micromachined lines for filter design on silicon
Author_Institution :
Dept. of Electr. Eng., South Florida Univ., Tampa, FL, USA
Abstract :
This paper presents a 10 GHz, CPW lowpass filter design on silicon which incorporates lumped element capacitors and high-impedance, micromachined transmission lines. The methodology yields small filter dimensions and broad, spurious-free rejection bands. The topology is free of electrically large discontinuities and thus can be accurately simulated using circuit CAD techniques.
Keywords :
S-parameters; coplanar waveguide components; electric impedance; equivalent circuits; low-pass filters; micromachining; microwave filters; passive filters; silicon; 10 GHz; CPW lowpass filter; Si; Si substrate; filter design; high impedance micromachined lines; lumped element capacitors; Capacitors; Circuit simulation; Circuit topology; Coplanar waveguides; Design automation; Distributed parameter circuits; Filters; Impedance; Silicon; Transmission line discontinuities;
Conference_Titel :
Silicon Monolithic Integrated Circuits in RF Systems, 1998. Digest of Papers. 1998 Topical Meeting on
Conference_Location :
Ann Arbor, MI, USA
Print_ISBN :
0-7803-5288-2
DOI :
10.1109/SMIC.1998.750215
