Title :
Modeling RF effects in integrated circuits with a new 3D alternating-direction-implicit Maxwell equation solver
Author :
Shao, Xi ; Goldsman, Neil ; Ramahi, Omar ; Guzdar, Parvez N.
Author_Institution :
Space Phys. Data Facility, NASA Goddard Space Flight Center, Greenbelt, MD, USA
Abstract :
Alternating-Direction-Implicit (ADI) method is used to solve the Maxwell´s equation in ICs, and to overcome the Courant´s limit. We have used ADI method to model the Metal-Insulator-Semiconductor-Substrate (MISS) structure. The simulations allowed us to calculate propagation losses, skin depth and dispersion of digital signals on non-ideal interconnects. The simulation results substrate currents and losses that depend on the substrate doping.
Keywords :
MOS integrated circuits; Maxwell equations; digital integrated circuits; integrated circuit interconnections; integrated circuit modelling; radiofrequency integrated circuits; skin effect; 3D alternating direction implicit method; Courant limit; IC; MISS; Maxwell equation; RF effects; digital signals; dispersion; integrated circuits; metal-insulator-semiconductor-substrate structure; nonideal interconnects; parasitic current flow; propagation losses; skin depth; Circuit simulation; Integrated circuit interconnections; Integrated circuit modeling; Maxwell equations; Metal-insulator structures; Propagation losses; Radio frequency; Radiofrequency integrated circuits; Semiconductor process modeling; Skin;
Conference_Titel :
Semiconductor Device Research Symposium, 2003 International
Print_ISBN :
0-7803-8139-4
DOI :
10.1109/ISDRS.2003.1272382
