Title :
Design and fabrication of liquid media sensors based on shear horizontal surface acoustic wave devices
Author :
Campitelli, Andrew ; Wlodarski, Wojciech
Author_Institution :
Dept. of Commun. & Electr. Eng., R. Melbourne Inst. of Technol., Vic., Australia
Abstract :
This paper reports on the design and fabrication of novel liquid media sensors based on Shear Horizontally Polarised Surface Acoustic Wave (SH-SAW) devices. The design and fabrication methodologies (etching and lift-off planar techniques) for the SH-SAW sensors are presented with an emphasis on optimisation techniques to enhance the sensitivity of the overall sensor system. Experimental results are presented showing the sensitivity to liquid viscosity and electrical permittivity and an improved method for liquid identification is established that utilises the sensor response in terms of frequency and attenuation for enhanced characteristic feature extraction
Keywords :
chemical sensors; liquids; permittivity measurement; surface acoustic wave sensors; viscosity measurement; SH-SAW sensor; design; electrical permittivity; etching; fabrication; feature extraction; lift-off; liquid identification; optimisation; planar technique; sensitivity; shear horizontal surface acoustic wave device; viscosity; Acoustic sensors; Acoustic waves; Design methodology; Design optimization; Etching; Fabrication; Polarization; Sensor systems; Surface acoustic wave devices; Viscosity;
Conference_Titel :
Optoelectronic and Microelectronic Materials And Devices Proceedings, 1996 Conference on
Conference_Location :
Canberra, ACT
Print_ISBN :
0-7803-3374-8
DOI :
10.1109/COMMAD.1996.610162
