Efficient design methodology of polymer based RF MEMS switches

Author

Ducarouge, B. ; Dubuc, David ; Melle, Serge ; Bary, L. ; Pons, P. ; Plana, R.

Author_Institution

LAAS-CNRS, Toulouse, France

fYear

2004

fDate

8-10 Sept. 2004

Firstpage

298

Lastpage

301

Abstract

We present a capacitive shunt switch topology related to a simple, fast and efficient design methodology. The proposed switch has been realized and measurements exhibit isolation better than -23 dB and losses less than 0.25 dB at 24 GHz for a pull down voltage of 22 V. In order to design and optimize more complex passive circuits, we have defined a scalable equivalent electrical model from electromagnetic simulations that allows a very fast optimization of the microwave performance. The RF power capability related to the electromigration effect of this structure has been also investigated and a maximum power handling of 10 W has been demonstrated.

Keywords

circuit optimisation; electromigration; microswitches; microwave switches; network synthesis; network topology; optimisation; polymers; 22 V; 24 GHz; RF MEMS switches; capacitive shunt switch topology; design methodology; electromagnetic simulations; electromigration effect; microwave performance optimization; passive circuits; polymer based MEMS switches; pull down voltage; scalable equivalent electrical model; Circuit topology; Design methodology; Design optimization; Electric variables measurement; Loss measurement; Microwave measurements; Polymers; Radiofrequency microelectromechanical systems; Switches; Switching circuits;

fLanguage

English

Publisher

ieee

Conference_Titel

Silicon Monolithic Integrated Circuits in RF Systems, 2004. Digest of Papers. 2004 Topical Meeting on

Print_ISBN

0-7803-8703-1

Type

conf

DOI

10.1109/SMIC.2004.1398228

Filename

1398228