Development of characterization methods for micromachined embedded test structures

Author

Davies-Venn, E. ; Pan, T. ; Baldi, A. ; Drayton, R.F. ; Ziaie, B.

Author_Institution

Dept. of Electr. Eng. & Comput. Eng., Minnesota Univ., Minneapolis, MN, USA

fYear

2004

fDate

8-10 Sept. 2004

Firstpage

318

Lastpage

321

Abstract

Methods of characterizing low frequency embedded passives on silicon substrates are suggested. Durioid fixtures and on-wafer methods are discussed for extracting Q factor of embedded coils on high and low resistivity silicon. Feedline designs are discuss and data is presented regarding the performance limitation of CPW based design architectures. A quality (Q) factor of an embedded inductor > 50 is successfully extracted for operation below 1 GHz based on a 15 turn configuration using S-parameter measurements. Finally inductor performance in terms of Q factor is presented based on on-wafer measurements.

Keywords

Q-factor measurement; S-parameters; coils; embedded systems; inductors; integrated circuit design; micromachining; passive networks; silicon; Q factor; S-parameter measurements; characterization methods; durioid fixtures; embedded coils; feedline designs; inductor performance; low frequency embedded passives; micromachined embedded test structures; on-wafer measurements; quality factor; silicon substrates; Coils; Conductivity; Data mining; Fixtures; Frequency; Inductors; Q factor; Q measurement; Silicon; Testing;

fLanguage

English

Publisher

ieee

Conference_Titel

Silicon Monolithic Integrated Circuits in RF Systems, 2004. Digest of Papers. 2004 Topical Meeting on

Print_ISBN

0-7803-8703-1

Type

conf

DOI

10.1109/SMIC.2004.1398234

Filename

1398234