DocumentCode
2625427
Title
Functional characterization of 3D-DDTC detectors fabricated at FBK-irst
Author
Zoboli, Andrea ; Boscardin, Maurizio ; Bosisio, Luciano ; Dalla Betta, Gian-Franco ; Eckert, Simon ; Kühn, Susanne ; Piemonte, Claudio ; Parzefall, Ulrich ; Ronchin, Sabina ; Zorzi, Nicola
Author_Institution
INFN, Sezione di Padova (Gruppo Collegato di Trento), Italy
fYear
2008
fDate
19-25 Oct. 2008
Firstpage
2721
Lastpage
2726
Abstract
We present selected results from the functional characterization of 3D-Double-Sided Double-Type Column (3D-DDTC) detectors fabricated at FBK, Trento. This technology features columnar electrodes etched perpendicularly to wafer surface and not passing all the way through the wafer thickness, stopping at short distance from the opposite surface. The detectors under investigation come from the first batch of these devices, made on n-type substrates. We report on the performances of microstrip sensors before and after irradiation up to 2×1015cm−2 fluences. The characterization has been carried out using a micrometer position resolved infrared laser scan and a 90Sr Beta source setup.
Keywords
Electrodes; Etching; Large Hadron Collider; Microstrip; Nuclear and plasma sciences; Optical device fabrication; Radiation detectors; Sensor phenomena and characterization; Voltage; Wafer bonding;
fLanguage
English
Publisher
ieee
Conference_Titel
Nuclear Science Symposium Conference Record, 2008. NSS '08. IEEE
Conference_Location
Dresden, Germany
ISSN
1095-7863
Print_ISBN
978-1-4244-2714-7
Electronic_ISBN
1095-7863
Type
conf
DOI
10.1109/NSSMIC.2008.4774937
Filename
4774937
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