• DocumentCode
    2625427
  • Title

    Functional characterization of 3D-DDTC detectors fabricated at FBK-irst

  • Author

    Zoboli, Andrea ; Boscardin, Maurizio ; Bosisio, Luciano ; Dalla Betta, Gian-Franco ; Eckert, Simon ; Kühn, Susanne ; Piemonte, Claudio ; Parzefall, Ulrich ; Ronchin, Sabina ; Zorzi, Nicola

  • Author_Institution
    INFN, Sezione di Padova (Gruppo Collegato di Trento), Italy
  • fYear
    2008
  • fDate
    19-25 Oct. 2008
  • Firstpage
    2721
  • Lastpage
    2726
  • Abstract
    We present selected results from the functional characterization of 3D-Double-Sided Double-Type Column (3D-DDTC) detectors fabricated at FBK, Trento. This technology features columnar electrodes etched perpendicularly to wafer surface and not passing all the way through the wafer thickness, stopping at short distance from the opposite surface. The detectors under investigation come from the first batch of these devices, made on n-type substrates. We report on the performances of microstrip sensors before and after irradiation up to 2×1015cm−2 fluences. The characterization has been carried out using a micrometer position resolved infrared laser scan and a 90Sr Beta source setup.
  • Keywords
    Electrodes; Etching; Large Hadron Collider; Microstrip; Nuclear and plasma sciences; Optical device fabrication; Radiation detectors; Sensor phenomena and characterization; Voltage; Wafer bonding;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Nuclear Science Symposium Conference Record, 2008. NSS '08. IEEE
  • Conference_Location
    Dresden, Germany
  • ISSN
    1095-7863
  • Print_ISBN
    978-1-4244-2714-7
  • Electronic_ISBN
    1095-7863
  • Type

    conf

  • DOI
    10.1109/NSSMIC.2008.4774937
  • Filename
    4774937