DocumentCode :
2625427
Title :
Functional characterization of 3D-DDTC detectors fabricated at FBK-irst
Author :
Zoboli, Andrea ; Boscardin, Maurizio ; Bosisio, Luciano ; Dalla Betta, Gian-Franco ; Eckert, Simon ; Kühn, Susanne ; Piemonte, Claudio ; Parzefall, Ulrich ; Ronchin, Sabina ; Zorzi, Nicola
Author_Institution :
INFN, Sezione di Padova (Gruppo Collegato di Trento), Italy
fYear :
2008
fDate :
19-25 Oct. 2008
Firstpage :
2721
Lastpage :
2726
Abstract :
We present selected results from the functional characterization of 3D-Double-Sided Double-Type Column (3D-DDTC) detectors fabricated at FBK, Trento. This technology features columnar electrodes etched perpendicularly to wafer surface and not passing all the way through the wafer thickness, stopping at short distance from the opposite surface. The detectors under investigation come from the first batch of these devices, made on n-type substrates. We report on the performances of microstrip sensors before and after irradiation up to 2×1015cm−2 fluences. The characterization has been carried out using a micrometer position resolved infrared laser scan and a 90Sr Beta source setup.
Keywords :
Electrodes; Etching; Large Hadron Collider; Microstrip; Nuclear and plasma sciences; Optical device fabrication; Radiation detectors; Sensor phenomena and characterization; Voltage; Wafer bonding;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Nuclear Science Symposium Conference Record, 2008. NSS '08. IEEE
Conference_Location :
Dresden, Germany
ISSN :
1095-7863
Print_ISBN :
978-1-4244-2714-7
Electronic_ISBN :
1095-7863
Type :
conf
DOI :
10.1109/NSSMIC.2008.4774937
Filename :
4774937
Link To Document :
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