Title :
Thick silicon drift detectors
Author :
Christophersen, Marc ; Phlips, Bernard F.
Author_Institution :
U.S. Naval Research Laboratory (NRC postdoc), Washington, DC 20375 USA
Abstract :
A new concept of silicon drift detector is presented that potentially allows much thicker devices. The detector is based on a trench array, which penetrate the bulk with different depths. Finite element (FEM) simulations of the detector structure will be presented and discussed. The key micro-fabrication technique for different depth trenches, so called “gray-tone lithography”, will be introduced and discussed in a feasibility study.
Keywords :
Breakdown voltage; Cathodes; Conductivity; Detectors; Etching; Laboratories; Lithography; Resists; Silicon; Telephony;
Conference_Titel :
Nuclear Science Symposium Conference Record, 2008. NSS '08. IEEE
Conference_Location :
Dresden, Germany
Print_ISBN :
978-1-4244-2714-7
Electronic_ISBN :
1095-7863
DOI :
10.1109/NSSMIC.2008.4774938