Design of microfabricated inductors for microprocessor power delivery

Author

Mehas, Gustavo J. ; Coonley, Kip D. ; Sullivan, Charles R.

Author_Institution

Thayer Sch. of Eng., Dartmouth Coll., Hanover, NH, USA

Volume

2

fYear

1999

fDate

14-18 Mar 1999

Firstpage

1181

Abstract

Microfabricated inductor designs are proposed for converters for microprocessor power delivery. The fabrication process uses anisotropic silicon etching to form V-grooves; granular metal/insulator nanoscale composite magnetic materials; and copper conductors. An application specific calculation procedure results in an inductor design with predicted power density over 200 W/cm² at 95% efficiency for an 8 MHz, 3.6 V to 1.1 V converter

Keywords

computer power supplies; etching; inductors; microprocessor chips; 3.6 to 1.1 V; 8 MHz; 95 percent; V-grooves formation; anisotropic silicon etching; application specific calculation procedure; copper conductors; granular metal/insulator nanoscale composite magnetic materials; microfabricated inductors design; microprocessor power delivery; power converters; power density; Anisotropic magnetoresistance; Etching; Fabrication; Inductors; Insulation; Magnetic materials; Metal-insulator structures; Microprocessors; Nanostructured materials; Silicon;

fLanguage

English

Publisher

ieee

Conference_Titel

Applied Power Electronics Conference and Exposition, 1999. APEC '99. Fourteenth Annual

Conference_Location

Dallas, TX

Print_ISBN

0-7803-5160-6

Type

conf

DOI

10.1109/APEC.1999.750518

Filename

750518