Design of Real-Time Image Acquisition System of IC Wafer

The real-time image acquisition system of micro automatic defects detection of IC wafer surface is researched. With semiconductor chips technology developing towards being minimized, IC wafer magnification increasing and image acquisition vision area getting small, the volume of image data become huge. The traditional PC focusing judgment and realtime control ability do not meet the practical demand. This paper gives the solution to solve the problem by the way of the real-time image focusing judgment and Z-axis focusing control. In this paper, the approach of image acquisition system software design and multitask control implementation in the condition of embedded operating system nucleus plus to improve stability and upgrade capability of the system is proposed. The startup procedure of Nucleus PLUS is introduced and details of the process of transplanting nucleus PLUS to S3C2410A is discussed. The major points and difficulties of the transplantation are analyzed.