Simulation of Electrostatically Suspended Micro-gyroscope Based on LabVIEW

Author

Qin, Kui ; Zhang, Weiping ; Chen, Wenyuan ; Liu, Wu ; Cui, Feng ; Wu, Xiaosheng

Author_Institution

Key Lab. for Thin Film & Microfabrication Technol. of Minist. of Educ., Shanghai Jiao Tong Univ., Shanghai, China

Volume

3

fYear

2011

fDate

6-7 Jan. 2011

Firstpage

249

Lastpage

252

Abstract

A novel electrostatically suspended gyroscope based on MEMS technology is presented in this article, including its structure and basic principle of electrostatic suspension. Especially integrated control strategy and position feedback PID control method of the Z-axis suspension system are analyzed. From the simulation result based on Lab VIEW model we can see that the gyroscope rotor can be suspended stably in about 17ms, verifying the feasibility of the integrated control method. This can help us develop actual hardware system to control the gyroscope´s suspension in the next experiment.

Keywords

gyroscopes; micromechanical devices; three-term control; virtual instrumentation; LabVIEW model; MEMS technology; PID control method; Z-axis suspension system; electrostatically suspended microgyroscope; gyroscope rotor; gyroscope suspension; hardware system; Electrodes; Electrostatics; Gyroscopes; Rotors; Substrates; Suspensions; Voltage control; Electrostatically Suspended Gyroscope; Integrated Control Strategy; LabVIEW Simulation;

fLanguage

English

Publisher

ieee

Conference_Titel

Measuring Technology and Mechatronics Automation (ICMTMA), 2011 Third International Conference on

Conference_Location

Shangshai

Print_ISBN

978-1-4244-9010-3

Type

conf

DOI

10.1109/ICMTMA.2011.633

Filename

5721470