The Online Measuring System for the Circular Pitch Error of Hob Chip Pocket

Author

Chunfeng, Zhao ; Yanxin, Wang ; Shengchao, Su ; Xiaolan, Fan

Author_Institution

Shanghai Univ. of Eng. & Sci., Shanghai, China

Volume

3

fYear

2011

fDate

6-7 Jan. 2011

Firstpage

874

Lastpage

877

Abstract

Aimed at no suitable online measuring instrument for circular pitch error of hob chip pocket, a new online measuring system using the half bridge inductive sensor DGC-6PG/A is put forwards into application in this paper. Measuring method and the structure of measuring system is introduced. Basing on making use of integrated signal conditioning circuit and Δ-Σ Analog-to-Digital converter, the system has combined high speed over sampling method and average filtering method to fulfill the high precision measurement of circular pitch sub-micron error. Experimental data according the adoption of inductive sensor and integrated signal conditioning circuit proves that stability performance better than ±0.01μm when sampling speed is limited under 100 Hz. So this online measuring system has high precision and lowers the surveyors´ complex work.

Keywords

delta-sigma modulation; error analysis; inductive sensors; instruments; Δ-Σ analog-to-digital converter; circular pitch submicron error; filtering method; half bridge inductive sensor; hob chip pocket; integrated signal conditioning circuit; online measuring instrument system; surveyor complex work; Coils; Digital filters; Displacement measurement; Inductance; Magnetic cores; Measurement uncertainty; Semiconductor device measurement; Circular Pitch Error; Hob; Inductive Sensor;

fLanguage

English

Publisher

ieee

Conference_Titel

Measuring Technology and Mechatronics Automation (ICMTMA), 2011 Third International Conference on

Conference_Location

Shangshai

Print_ISBN

978-1-4244-9010-3

Type

conf

DOI

10.1109/ICMTMA.2011.791

Filename

5721628