Theoretical Design and Experiment of a Plate Type Multi-degree-of-freedom Piezoelectric Motor

Theoretical design and experiment are presented for a proposed plate type multi-degree-of-freedom piezoelectric motor. The method for calculating the working modal frequency of the piezoelectric motor is investigated, and the principles to determine the dimensions of the structure and spacing of the protrusions are provided. According to the design theory, a prototype was fabricated to test the practical kinematics performance of the piezoelectric motor. Experimental results show that the numerical results of modal frequencies of the motor indicate good agreement with the FEM and experimental one.