Title :
The method of decreasing of additional errors of semiconductor gas sensor
Author :
Julia, Anischenko ; Michel, Guselnikov
Author_Institution :
Tomsk Polytech. Univ., Tomsk
Abstract :
The perspective of semiconductor gas sensors was presented. The review of existing gas sensors was given. The method, allowing to determine the concentrations of several gases by one sensor was offered.
Keywords :
chemical variables measurement; gas sensors; semiconductor devices; error decrease; gas concentration determination; semiconductor gas sensor; Costs; Gas detectors; Gases; Hydrogen; Manufacturing; Optical sensors; Semiconductor device manufacture; Semiconductor films; Sensor phenomena and characterization; Temperature sensors;
Conference_Titel :
Strategic Technologies, 2008. IFOST 2008. Third International Forum on
Conference_Location :
Novosibirsk-Tomsk
Print_ISBN :
978-1-4244-2319-4
Electronic_ISBN :
978-1-4244-2320-0
DOI :
10.1109/IFOST.2008.4603004
