DocumentCode
2630945
Title
The method of decreasing of additional errors of semiconductor gas sensor
Author
Julia, Anischenko ; Michel, Guselnikov
Author_Institution
Tomsk Polytech. Univ., Tomsk
fYear
2008
fDate
23-29 June 2008
Firstpage
608
Lastpage
610
Abstract
The perspective of semiconductor gas sensors was presented. The review of existing gas sensors was given. The method, allowing to determine the concentrations of several gases by one sensor was offered.
Keywords
chemical variables measurement; gas sensors; semiconductor devices; error decrease; gas concentration determination; semiconductor gas sensor; Costs; Gas detectors; Gases; Hydrogen; Manufacturing; Optical sensors; Semiconductor device manufacture; Semiconductor films; Sensor phenomena and characterization; Temperature sensors;
fLanguage
English
Publisher
ieee
Conference_Titel
Strategic Technologies, 2008. IFOST 2008. Third International Forum on
Conference_Location
Novosibirsk-Tomsk
Print_ISBN
978-1-4244-2319-4
Electronic_ISBN
978-1-4244-2320-0
Type
conf
DOI
10.1109/IFOST.2008.4603004
Filename
4603004
Link To Document