Title :
Using the trajectory analysis for measuring nano-objects by the interference phase-shifting systems
Author :
Guzhov, Vladimir Ivanovich ; Ilinykh, Sergey Petrovich ; Ilyin, Maxim Eduardovich
Author_Institution :
Novosibirsk State Tech. Univ., Novosibirsk
Abstract :
Therefore, the balance of random and systematic variations of brightness field in interferograms and calibration of phase shifts is required for practical realization of the extreme precision characteristics. Trajectory method of analysing the inteferogams is developed, it allows to avoid the influence of determined destabilizing factors and does not require a priori value of inserted phase shifts. The developed trajectory method of analysing the interferograms has no analog in Russia and abroad and allows to increase the exactness of interferential measurements considerably to lambda/10000 and more.
Keywords :
brightness; light interference; nanotechnology; phase shifting interferometry; destabilizing factors; interference phase-shifting systems; interferential measurements; nanoobject measurement; phase shifts; trajectory analysis; Adaptive optics; Brightness; Distortion measurement; Interference; Measurement errors; Optical distortion; Optical filters; Optical interferometry; Phase measurement; Signal analysis;
Conference_Titel :
Strategic Technologies, 2008. IFOST 2008. Third International Forum on
Conference_Location :
Novosibirsk-Tomsk
Print_ISBN :
978-1-4244-2319-4
Electronic_ISBN :
978-1-4244-2320-0
DOI :
10.1109/IFOST.2008.4603022
