Title :
Technologies for on-chip optical interconnects
Author :
Van Thourhout, D. ; Roelkens, G. ; Van Campenhout, J. ; Brouckaert, J. ; Baets, R.
Author_Institution :
Dept. of Inf. Technol., Ghent Univ., Gent, Belgium
Abstract :
We propose an integration approach for on-chip optical interconnect compatible with waferscale processing technologies and future advanced electronic circuits. The use of ultra-compact SOI-based wiring circuitry is demonstrated. First heterogeneously integrated optoelectronic devices coupled to these waveguides are shown.
Keywords :
integrated optics; integrated optoelectronics; optical interconnections; optical waveguides; silicon-on-insulator; Si-SiO2; advanced electronic circuits; integrated optoelectronic devices; integration approach; on-chip interconnects; optical interconnects; optical waveguides; ultracompact SOI; waferscale processing; wiring circuitry; Electromagnetic waveguides; Electronic circuits; Integrated circuit interconnections; Optical interconnections; Optical waveguides; Optoelectronic devices; Silicon; Substrates; Wafer bonding; Wire;
Conference_Titel :
Lasers and Electro-Optics Society, 2005. LEOS 2005. The 18th Annual Meeting of the IEEE
Print_ISBN :
0-7803-9217-5
DOI :
10.1109/LEOS.2005.1547950
