Integrable planar photonic crystal devices in silicon using nonlinear effects

Author

Reinke, Charles M. ; Jafarpour, Ashkan ; Jiandong Huang ; Soltani, Mahdi ; Momeni, B. ; Adibi, Ali

Author_Institution

Sch. of Electr. & Comput. Eng., Georgia Inst. of Technol., Atlanta, GA, USA

fYear

2005

fDate

22-28 Oct. 2005

Firstpage

229

Lastpage

230

Abstract

This paper is focused on nonlinear photonic crystal (PC) structures from theoretical, fabrication, and practical points of views. The material platform for these structures is Si photonic crystals (fabricated using electron beam lithography and dry etching) infiltrated with nonlinear optical polymers. A two-dimensional finite-difference time-domain (FDTD) simulation tool based on a modification of the original Yee´s FDTD algorithm is developed.

Keywords

electron beam lithography; elemental semiconductors; etching; finite difference time-domain analysis; nonlinear optics; optical polymers; photonic crystals; silicon; Si; Si photonic crystals; dry etching; electron beam lithography; infiltrated; nonlinear effects; nonlinear optical polymers; planar photonic crystal devices; silicon; two-dimensional finite-difference time-domain; Crystalline materials; Dry etching; Electron beams; Finite difference methods; Lithography; Optical device fabrication; Optical materials; Photonic crystals; Silicon; Time domain analysis;

fLanguage

English

Publisher

ieee

Conference_Titel

Lasers and Electro-Optics Society, 2005. LEOS 2005. The 18th Annual Meeting of the IEEE

Print_ISBN

0-7803-9217-5

Type

conf

DOI

10.1109/LEOS.2005.1547954

Filename

1547954