DocumentCode
2631799
Title
MEMS based tunable short-wavelength infrared sensors
Author
Faraone, L.
Author_Institution
Microelectronics Res. Group, Sch. of Electr., Electron. & Comput. Eng., Western Australia Univ., Nedlands, WA, Australia
fYear
2005
fDate
22-28 Oct. 2005
Firstpage
249
Lastpage
250
Abstract
A low temperature MEMS process integrated with an infrared detector technology has been developed. The integrated microsystem is capable of electrically selecting narrow wavelength bands in the range from 1.6 to 2.5 μm within the short-wavelength infrared (SWIR) region of the electromagnetic spectrum. Modelling of optical and mechanical aspects of the design along with further experimental is presented.
Keywords
infrared detectors; integrated optics; micro-optics; micromechanical devices; optical tuning; MEMS; infrared detector; integrated microsystem; short-wavelength infrared sensors; Biomembranes; Chemical technology; Infrared detectors; Infrared sensors; Micromechanical devices; Mirrors; Optical filters; Photoconductivity; Photodiodes; Radiation detectors;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers and Electro-Optics Society, 2005. LEOS 2005. The 18th Annual Meeting of the IEEE
Print_ISBN
0-7803-9217-5
Type
conf
DOI
10.1109/LEOS.2005.1547964
Filename
1547964
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