Title :
MEMS based tunable short-wavelength infrared sensors
Author_Institution :
Microelectronics Res. Group, Sch. of Electr., Electron. & Comput. Eng., Western Australia Univ., Nedlands, WA, Australia
Abstract :
A low temperature MEMS process integrated with an infrared detector technology has been developed. The integrated microsystem is capable of electrically selecting narrow wavelength bands in the range from 1.6 to 2.5 μm within the short-wavelength infrared (SWIR) region of the electromagnetic spectrum. Modelling of optical and mechanical aspects of the design along with further experimental is presented.
Keywords :
infrared detectors; integrated optics; micro-optics; micromechanical devices; optical tuning; MEMS; infrared detector; integrated microsystem; short-wavelength infrared sensors; Biomembranes; Chemical technology; Infrared detectors; Infrared sensors; Micromechanical devices; Mirrors; Optical filters; Photoconductivity; Photodiodes; Radiation detectors;
Conference_Titel :
Lasers and Electro-Optics Society, 2005. LEOS 2005. The 18th Annual Meeting of the IEEE
Print_ISBN :
0-7803-9217-5
DOI :
10.1109/LEOS.2005.1547964
